Perovskite evaporation tool

Diffusion furnace

Atomic layer deposition

Equipment & Facilities

  • 800 m² solar technology center (SolarTeC) for the processing of solar cells using industrial equipment
  • Ion implanter (together with the MBE Institute of the LUH and other users of the LNQE)
  • Clean room laboratories for 6” silicon technology (wet-chemical cleaning, furnace and plasma processes)
  • Oxidation and diffusion furnaces
  • Remote and direct plasma deposition systems (PECVD)
  • Industrial SiNx deposition tool based on the ICP technique
  • Low-pressure chemical vapor deposition of doped amorphous silicon layers
  • Thermal and plasma-assisted atomic layer deposition (ALD)
  • Ultra-fast ALD tool
  • Cluster PECVD tool for the deposition of doped amorphous silicon layers
  • Co-evaporation of perovskites
  • Industrial screen printers and firing furnaces for the solar cell metallization
  • Integrated high-rate inline deposition and sputtering system
  • Laser laboratory with five laser material processing systems
  • Interconnection and module technology: soldering equipment, stringer, laminator
  • Climate chambers as well as UV- and halogen-lamp irradiation chambers
  • Transport simulation for PV modules (Shaker)
  • Module flasher, electroluminescence, thermography, and fluorescence set-ups for PV module characterization
  • Insulation test for PV modules
  • Solar simulators and spectral response set-ups for 6”-solar cells
  • Fully-automated integrated solar cell characterization tool
  • Camera-based electro- and photoluminescence equipment for solar cells and wafers
  • Quasi-steady-state photoconductance (QSSPC)
  • Microwave-detected photoconductive decay (MW-PCD)
  • Temperature- and injection-dependent lifetime spectroscopy (TIDLS)
  • Capacitance-voltage measurements (CV)
  • Doping profile measurement by ECV method
  • Light and scanning electron microscopy
  • Energy-dispersive X-ray analysis and diffraction (EDX and XRD)
  • Raman spectrometer and X-ray diffractometer
  • Setup for temperature-dependent Hall measurements
  • 4-line bending set-up for mechanical load tests of PV modules

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