1.
ICP-PECVD production tool for industrial AlOx and Si-based passivation layers Proceedings Article
In: WIP, (Hrsg.): Proceedings of the 27th European Photovoltaic Solar Energy Conference, S. 1684-1687, Frankfurt, Germany, 2012, ISBN: 3-936338-28-0.
2.
High-efficiency industrial-type PERC solar cells applying ICP AlOx as rear passivation layer Proceedings Article
In: WIP, (Hrsg.): Proceedings of the 27th European Photovoltaic Solar Energy Conference, S. 672-675, Frankfurt, Germany, 2012, ISBN: 3-936338-28-0.