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1.

B F P Roos; T Dippell; O Hohn; P Wohlfart; B Beier; B Veith-Wolf; M Siebert; T Dullweber

ICP-PECVD production tool for industrial AlOx and Si-based passivation layers Proceedings Article

In: WIP, (Hrsg.): Proceedings of the 27th European Photovoltaic Solar Energy Conference, S. 1684-1687, Frankfurt, Germany, 2012, ISBN: 3-936338-28-0.

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2.

T Dullweber; M Siebert; B Veith; C Kranz; J Schmidt; R Brendel; B F P Roos; T Dippell; A Schwabedissen; S Peters

High-efficiency industrial-type PERC solar cells applying ICP AlOx as rear passivation layer Proceedings Article

In: WIP, (Hrsg.): Proceedings of the 27th European Photovoltaic Solar Energy Conference, S. 672-675, Frankfurt, Germany, 2012, ISBN: 3-936338-28-0.

Links | BibTeX