@inproceedings{Chen2012,

title = {Understanding coupled oxide growth and phosphorus diffusion in POCl3 deposition for control of phosphorus emitter diffusion},

author = {R Chen and H Wagner and A Dastgheib-Shirazi and M Kessler and Z Zhu and P P. Altermatt and S T Dunham},

editor = {IEEE},

doi = {10.1109/PVSC.2012.6317603},

isbn = {978-1-4673-0064-3},

year  = {2012},

date = {2012-06-01},

booktitle = {2012 38th IEEE Photovoltaic Specialists Conference},

pages = {000213-000216},

address = {Austin, TX, USA},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}