@article{Mader2011c,

title = {Temperature of silicon wafers during in-line high-rate evaporation of aluminum},

author = {C Mader and M Kessler and U Eitner and R Brendel},

doi = {10.1016/j.solmat.2011.06.031},

issn = {0927-0248},

year  = {2011},

date = {2011-11-01},

journal = {Solar Energy Materials and Solar Cells},

volume = {95},

number = {11},

pages = {3047-3053},

keywords = {},

pubstate = {published},

tppubtype = {article}

}