@inproceedings{Vermang2011,
title = {Spatially-separated atomic layer deposition of Al2O3, a new option for high-throughput si solar cell passivation},
author = {B Vermang and F Werner and W Stals and A Lorenz and A Rothschild and J John and J Poortmans and R Mertens and R Gortzen and P Poodt and F Roozeboom and J Schmidt},
editor = {IEEE},
doi = {10.1109/PVSC.2011.6186155},
issn = {0160-8371},
year = {2011},
date = {2011-06-01},
booktitle = {2011 37th IEEE Photovoltaic Specialists Conference},
pages = {001144-001149},
address = {Seattle, WA, USA},
keywords = {},
pubstate = {published},
tppubtype = {inproceedings}
}