@inproceedings{Krügener2014,

title = {Structural investigation of ion implantation of boron on random pyramid textured Si(100) for photovoltaic applications},

author = {J Krügener and E Bugiel and R Peibst and F Kiefer and T Ohrdes and R Brendel and H J Osten},

doi = {10.1109/IIT.2014.6940060},

isbn = {978-1-4799-5213-7},

year  = {2014},

date = {2014-06-26},

booktitle = {Proceedings of the 20th International Conference on Ion Implantation Technology (IIT)},

journal = {Proceedings of the 20th International Conference on Ion Implantation Technology},

address = {Portland, OR, USA},

keywords = {},

pubstate = {published},

tppubtype = {inproceedings}

}