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Charge carrier lifetime degradation in Cz silicon through the formation of a boron-rich layer during BBr 3 diffusion processes
article
2010
authors
Kessler, M. A. and Ohrdes, T. and Wolpensinger, B. and Harder, N-P
journal
Semiconductor Science and Technology
doi:10.1088/0268-1242/25/5/055001
de
en