High-efficiency industrial-type PERC solar cells applying ICP AlOx as rear passivation layer
inproceedings
2012
authors Dullweber, T. and Siebert, M. and Veith, B. and Kranz, C. and Schmidt, J. and Brendel, R. and Roos, B. F. P. and Dippell, T. and Schwabedissen, A. and Peters, S.