A novel separate-precursor-pulse PECVD SiOx as interfacial oxide for polysilicon passivating contacts applied to industrial high efficiency silicon solar cells
authors
Larionova, Yevgeniya and Nguyen, Viet Xuan and Pernau, Thomas and Seiffert, Daniela and Brendel, Rolf and Dullweber, Thorsten
Larionova, Yevgeniya and Nguyen, Viet Xuan and Pernau, Thomas and Seiffert, Daniela and Brendel, Rolf and Dullweber, Thorsten
journal
Materials Science in Semiconductor Processing
Materials Science in Semiconductor Processing