A 360-degree view of the process tools at SolarTeC.

ISFH-SolarTeC: Industrial process tools for silicon photovoltaics

At ISFH SolarTeC, we process silicon solar cells in a production-oriented environment using industry-standard equipment. At the heart of this infrastructure is the 800 m² technology center, which houses equipment for wet chemistry, diffusion, oxidation, PECVD coating, screen printing metallization and module production. The technology center is complemented by a laboratory for laser processes.

At ISFH, we take an industry-oriented approach to developing new technologies that are ideally suited as drop-ins or add-ons for today's industrial mainstream. Current examples are passivating "Poly-Si-on-Oxide" (POLO) contacts and tandem solar cell concepts. This is achieved through close cooperation between all working groups in the photovoltaics department.

A particular strength of the SolarTeC at ISFH is its flexibility. We have many years of experience in comparing the processes and systems of our partners with our reference processes and systems at the SolarTeC using cross-processing. This offers our partners the opportunity to evaluate specific materials and individual process steps or to develop alternative solar cell and PV module concepts together with us.

 

Industrial tools at SolarTeC

Inline system for one-sided polishing and etching (RENA)
Batch system for wet chemical cleaning, Si-etching, texture (RENA)
Oxidation, POCl3 and BBr3 diffusion furnace
Low pressure chemical vapor deposition (LPCVD) of doped amorphous silicon layers
PECVD system for SiN, AlOx and doped amorphous silicon layers (poly-Si)
Laser laboratory with four laser material processing systems
Screen printer for the metallization of solar cells (DEK, ASYS)
Industrial furnace for the formation of screen-printed contacts

Contact

Dr. Verena Mertens

+49(0)5151-999 315

Contact

Dr. Thorsten Dullweber

Head of PV department: Infrastructure

+49(0)5151-999 642