Overall mechanical properties of polysilicon films: homogenization vs. Monte Carlo simulations 14. Jan. 2022 [featured_image] Download Download is available until [expire_date] Version Download 200 Dateigrösse 4.28 MB Datei-Anzahl 1 Erstellungsdatum 14. Januar 2022 Zuletzt aktualisiert 14. Januar 2022 Overall mechanical properties of polysilicon films: homogenization vs. Monte Carlo simulations