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1.

P Jäger; V Mertens; U Baumann; T Dullweber

A Detailed Chemical Model for the Diffusion of Phosphorus Into the Silicon Wafer During POCl3 Diffusion Artikel

In: IEEE Journal of Photovoltaics, Bd. 11, Nr. 1, S. 50-57, 2021.

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2.

R Chen; H Wagner; A Dastgheib-Shirazi; M Kessler; Z Zhu; P P. Altermatt; S T Dunham

Understanding coupled oxide growth and phosphorus diffusion in POCl3 deposition for control of phosphorus emitter diffusion Proceedings Article

In: IEEE, (Hrsg.): 2012 38th IEEE Photovoltaic Specialists Conference, S. 000213-000216, Austin, TX, USA, 2012, ISBN: 978-1-4673-0064-3.

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