Equipment & Facilities

Perovskite evaporation tool

Diffusion furnace

Atomic layer deposition

  • 800 m² solar technology center (SolarTeC) for the processing of solar cells using industrial equipment (batch and inline wet chemical tools, diffusion and oxidation furnace, direct plasma enhanced chemical vapor deposition (PECVD), screen printer, firing furnace)
  • Ion implanter (together with the MBE Institute of the LUH and other users of the LNQE)
  • Clean room laboratories for 6” silicon technology (wet-chemical)
  • Laser laboratory with four laser material processing systems
  • Low-pressure chemical vapor deposition (LPCVD) of doped amorphous silicon layers
  • PECVD tools for the deposition of doped amorphous silicon layers
  • Thermal and plasma-assisted atomic layer deposition (ALD)
  • Ultra-fast ALD tool
  • Co-evaporation of perovskites
  • Wet chemical deposition of perovskites
  • Sequential deposition of perovskites
  • Integrated high-rate inline deposition and sputtering system
  • Ion implanter (together with the MBE Institute of the LUH and other users of the LNQE)
  • PV module technology: soldering equipment, laminator
  • Climate chambers as well as UV- and halogen-lamp irradiation chambers
  • Transport simulation for PV modules (Shaker)
  • PV module flasher, electroluminescence and fluorescence set-ups for PV module characterization
  • Isolation test stand for PV modules
  • Solar simulators and spectral response set-ups for 6”-solar cells and PV modules
  • Fully-automated integrated solar cell characterization tool (LOANA)
  • Camera-based electro- and photoluminescence equipment for solar cells and wafers
  • Fully integrated analysis tool for multijunction solar cells (LOANA-mj)
  • Quasi-steady-state photoconductance (QSSPC)
  • Microwave-detected photoconductance decay (MW-PCD)
  • Temperature- and injection-dependent lifetime spectroscopy (TIDLS)
  • Capacitance-voltage measurements (CV)
  • Doping profile measurement by ECV method
  • Optical and scanning electron microscopy
  • Energy-dispersive X-ray analysis and diffraction (EDX and XRD)
  • Raman spectrometer and X-ray diffractometer
  • Measurement set-up for temperature-dependent Hall measurements
  • Practical, electrically-powered light commercial vehicle as demonstrator for vehicle-integrated photovoltaics with feed-in to high-voltage on-board network