UV Stability of Aluminum Oxide Fabricated with Tube–Type Plasma–Enhanced Atomic Layer Deposition
article
2025
authors Hollemann, Christina and Min, Byungsul and Nguyen, Viet X. and Pernau, Thomas and Seiffert, Daniela and Haverkamp, Helge and Brendel, Rolf and Schulte–Huxel, Henning